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LEGEX

Product Overview

The LEGEX Series is Mitutoyo’s flagship Ultra-high Accuracy CNC CMM, delivering world-class precision with E0, MPE = 0.28 + L/1000 µm. Built on a rigid fixed-bridge architecture with ductile cast iron, it features crystallized-glass scales with a near-zero thermal expansion coefficient (0.01 µm resolution), real-time temperature compensation, and multi-probe compatibility for ultimate measuring performance.

Model

LEGEX 500

LEGEX 700

LEGEX 900

Product Specification

Machine Size (X/Y/Z Axis) (mm.)
500/700/400
Accuracy (µm*) with SP25M *Specifications vary depending on configuration, size, and thermal environment.
19-21°C (66.2-69.8°F)
Guide method
Air bearings on each axis
Movement speed (mm/s)
Maximum Drive Speed 3D 200 mm/s
Drive acceleration (mm/s2)
Maximum Acceleration 3D 0.1G (980 mm/s2)
Resolution (mm)
0.01µm
Measuring table - Material and Size
Cast Iron with Ceramic Coating / 550 x 750
Workpiece – Maximum height (mm) and Maximum mass (kg)
700 mm. / 250 kg.
Main unit dimensions (mm) Height / Width / Depth
2630x1470x2430
Mass (kg) <including the installation platform and control device but excluding workpiece>
3500.0
Power requirements – Voltage, Frequency / Power consumption (including probe options I/F)
-
Air supply – Pressure / Consumption
58.0 PSI (0.5MPa) / 120 L/min under normal conditions (air source: 160 L/min)
Operating temperature range
18 - 22 °C

Other details

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Product Specification

Machine Size (X/Y/Z Axis) (mm.)
700/700/400
Accuracy (µm*) with SP25M *Specifications vary depending on configuration, size, and thermal environment.
19-21°C (66.2-69.8°F)
Guide method
Air bearings on each axis
Movement speed (mm/s)
Maximum Drive Speed 3D 200 mm/s
Drive acceleration (mm/s2)
Maximum Acceleration 3D 0.1G (980 mm/s2)
Resolution (mm)
0.01µm
Measuring table - Material and Size
Cast Iron with Ceramic Coating / 750 x 750
Workpiece – Maximum height (mm) and Maximum mass (kg)
700 mm. / 250 kg.
Main unit dimensions (mm) Height / Width / Depth
2630x1670x2430
Mass (kg) <including the installation platform and control device but excluding workpiece>
5000.0
Power requirements – Voltage, Frequency / Power consumption (including probe options I/F)
-
Air supply – Pressure / Consumption
58.0 PSI (0.5MPa) / 120 L/min under normal conditions (air source: 160 L/min)
Operating temperature range
18 - 22 °C

Product Specification

Machine Size (X/Y/Z Axis) (mm.)
900/1000/600
Accuracy (µm*) with SP25M *Specifications vary depending on configuration, size, and thermal environment.
19-21°C (66.2-69.8°F)
Guide method
Air bearings on each axis
Movement speed (mm/s)
Maximum Drive Speed 3D 200 mm/s
Drive acceleration (mm/s2)
Maximum Acceleration 3D 0.1G (980 mm/s2)
Resolution (mm)
0.01µm
Measuring table - Material and Size
Cast Iron with Ceramic Coating / 950 x 1050
Workpiece – Maximum height (mm) and Maximum mass (kg)
850 mm. / 800 kg.
Main unit dimensions (mm) Height / Width / Depth
3050x1870x3030
Mass (kg) <including the installation platform and control device but excluding workpiece>
6500.0
Power requirements – Voltage, Frequency / Power consumption (including probe options I/F)
-
Air supply – Pressure / Consumption
58.0 PSI (0.4MPa) / 120 L/min under normal conditions (air source: 160 L/min)
Operating temperature range
18 - 22 °C

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