Model
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Machine Size (X/Y/Z Axis) (mm.)
500/700/400
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Accuracy (µm*) with SP25M *Specifications vary depending on configuration, size, and thermal environment.
E0 = 0.7+2.5L/1000
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Guide method
Air bearings on each axis
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Movement speed (mm/s)
Maximum Drive Speed 3D 519 mm/s
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Drive acceleration (mm/s2)
Maximum Acceleration 3D 0.17G (2,309 mm/s2)
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Resolution (mm)
5e-05
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Measuring table - Material and Size
Granite / 676 x 1420
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Workpiece – Maximum height (mm) and Maximum mass (kg)
560 mm. / 180 kg.
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Main unit dimensions (mm) Height / Width / Depth
1270x1700x2410
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Mass (kg) <including the installation platform and control device but excluding workpiece>
1530.0
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Power requirements – Voltage, Frequency / Power consumption (including probe options I/F)
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Air supply – Pressure / Consumption
0.4 MPa (4 kgf/cm2 ) / 60 L/min under normal conditions (air source: 120 L/min)
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Operating temperature range
18 - 22 °C